English
SEM
· The product portfolio includes scanning electron microscopes (SEM), transmission electron microscopes (TEM), focused ion beam-scanning electron microscopes (FIB-SEM) and other instruments
· Core technical specifications reach internationally advanced levels
· The equipment is widely applied in numerous fields such as materials science, semiconductors, biomedicine and new energy
· Core technical specifications reach internationally advanced levels
· The equipment is widely applied in numerous fields such as materials science, semiconductors, biomedicine and new energy
产品详情介绍
Product Details
Specifications | |||||
Key Parameters | Parameters | SEM4000X | SEM4000Pro | SEM5000Pro | SEM5000× |
Resolution | 0.9 nm@30 kV, SE 1.2 nm@15 kV, SE 1.9nm@1 kV, SE 1.5 nm@1 kV(Super Deceleration) 1.0nm@15kV(Super Deceleration) | 0.9 nm @30 kV, SE 2.5 nm @30 kV, BSE, 30 Pa 1.5nm@30 kV, SE,30 Pa | 0.8nm@15kV,SE | 0.6nm@15kV,SE | |
Accelerating Voltage | 200 V~30 kV | 200V~30 kV | 20V~30 kV | 20V~30kV | |
Magnification | 1~1,000,000× | 1 ~1,000,000× | 1~2,500,000× | 1~2,500,000× | |
Electron Gun Type | Schottky FEG | ||||
Sample Chamber | Low Vacuum Mode | / | Maximum 180 Pa | / | / |
Camera | Dual Cameras (Optical Navigation + Chamber Monitoring) | ||||
XY Travel | 110mm | 110mm | 110mm | 110mm | |
Z Travel | 50mm | 65mm | 50 mm | 65 mm | |
T Travel | -10°~+70° | -10°~+70° | -10°~+70° | -10°~+70° | |
R Travel | 360° | 360° | 360° | 360° | |
产品推荐
recommend
